J.A. Woollam
Ellipsometer

J. A. Woollam Co., Inc is a manufacturer of spectroscopic ellipsometers for non-destructive thin film and bulk material characterization. Spectroscopic ellipsometry is used for characterization of all types of materials: dielectrics, semiconductors, metals, organics, and more.

Specification

J.A. Woollam offer ellipsometers covering a spectral range to meet any need (from the vacuum UV to the far IR). Their ellipsometers come with many upgrade options: automated sample translation, variable temperature (heating or cooling), focusing optics, liquid cells, etc.

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Product Models

# Image Model Name Detail
M-2000 The M-2000® line of spectroscopic ellipsometers is engineered to meet the diverse demands of thin film characterization. An advanced optical design, wide spectral range, and fast data acquisition combine in an extremely powerful and versatile tool. The M-2000 delivers both speed and accuracy. Our patented RCE technology combines Rotating Compensator Ellipsometry with high-speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second with a wide array of configurations.
RC2 The RC2® design builds on 25 years of experience. It combines the best features of previous models with innovative new technology: dual rotating compensators, achromatic compensator design, advanced light source and next-generation spectrometer design.
iSE The iSE is a new in-situ spectroscopic ellipsometer developed for real-time monitoring of thin film processing. Using our proven technology, the iSE enables users to optimize optical properties of deposited films, control film growth with sub-angstrom sensitivity, and monitor growth kinetics.
theta-SE The theta-SE is a push-button spectroscopic ellipsometer for characterizing thin film uniformity. It features advanced ellipsometry instrumentation in a compact package at an affordable price.
VASE The VASE® is an accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It combines high accuracy and precision with a wide spectral range – up to 193 to 3200nm. Variable wavelength and angle of incidence allow flexible measurement capabilities.
alpha-SE ALPHA-SE ELLIPSOMETER For routine measurements of thin film thickness and refractive index, this ellipsometer allows you to mount a sample, choose the model that matches your film, and press “measure”. You have results within seconds.
IR-VASE The IR-VASE® is the first and only spectroscopic ellipsometer to combine the chemical sensitivity of FTIR spectroscopy with thin film sensitivity of spectroscopic ellipsometry. The IR-VASE covers the wide spectral range from 1.7 to 30 microns (333 to 5900 wavenumbers). It is used to characterize both thin films and bulk materials in research and industry. This rapidly growing technology is finding uses in the optical coatings, semiconductor, biological and chemical industries, as well as research labs.
VUV-VASE The VUV-VASE® variable angle spectroscopic ellipsometer is the gold standard for optical characterization of lithography thin films. It measures wavelengths from vacuum ultraviolet (VUV) to near infrared (NIR). This provides incredible versatility to characterize numerous materials: semiconductors, dielectrics, polymers, metals, multi-layers and liquids such as immersion fluids.

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