J.A. Woollam
IR VASE Ellipsometer

The IR-VASE® is the first and only spectroscopic ellipsometer to combine the chemical sensitivity of FTIR spectroscopy with thin film sensitivity of spectroscopic ellipsometry. The IR-VASE covers the wide spectral range from 1.7 to 30 microns (333 to 5900 wavenumbers). It is used to characterize both thin films and bulk materials in research and industry. This rapidly growing technology is finding uses in the optical coatings, semiconductor, biological and chemical industries, as well as research labs.

Specification

Ellipsometer ConfigurationRCE
Wavelength Range1.7μm to 30μm
333cm-1 to 5900cm-1
Resolution1cm-1 to 64cm-1 (user defined)
DetectorDTGS
Angles of Incidence26° to 90°
Data Acquisition Rate
(Complete Spectrum)
1 to 30 minutes, typical
(1 angle of incidence at 16cm-1 resolution)
*Finer resolution will require longer time.

Max substrate thickness


DOWNLOAD BROCHURE

20mm

Product Models

# Image Model Name Detail

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