J.A. Woollam
RC2 Ellipsometer
The RC2® design builds on 25 years of experience. It combines the best features of previous models with innovative new technology: dual rotating compensators, achromatic compensator design, advanced light source and next-generation spectrometer design. The RC2 is a near-universal solution for the diverse applications of spectroscopic ellipsometry.
Specification
| Ellipsometer Configuration | Dual RCE | |
| Wavelength Range | D D+NIR X X+NIR X+XNIR U U+NIR | 193-1000 nm 193-1690 nm 210-1000 nm 210-1690 nm 210-2500 nm 210-1000 nm 210-1690 nm |
| Number of Wavelengths | D D+NIR X X+NIR X+XNIR U U+NIR | ~800 ~1075 ~790 ~1065 ~1065 ~790 ~1065 |
| Detector | CCD | |
| Angles of Incidence | 45°-90° (Automated Angle Base) 20°-90° (Vertical Automated Angle Base) ~65° (Focused Base) 65° (Fixed Angle Base) 65° (Test Base) | |
| Data Acquisition Rate (Complete Spectrum) | 0.3 seconds (2-10 seconds is Typical) | |
Max substrate thickness | 18mm | |
Product Models
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