J.A. Woollam
VUV-VASE
The VUV-VASE® variable angle spectroscopic ellipsometer is the gold standard for optical characterization of lithography thin films. It measures wavelengths from vacuum ultraviolet (VUV) to near infrared (NIR). This provides incredible versatility to characterize numerous materials: semiconductors, dielectrics, polymers, metals, multi-layers and liquids such as immersion fluids.
Specification
| Ellipsometer Configuration | RAE with AutoRetarder | |
| Wavelength Range | VUV-VASE (Standard) VUV-VASE+NIR VUV-VASE+XNIR | 146-1100 nm 146-1700 nm 146-2500 nm |
| Number of Wavelengths | User defined before measurement | |
| Angles of Incidence | 10° to 90° (146nm to 310nm) 25° to 90° (310nm to 2500nm) | |
Data Acquisition Rate | 1 to 3 seconds per wavelength | |
Product Models
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